SPECIFICATION

1. Chamber dimension : 900W X 2500D X 1250H
2. RMU 1or 2 Test
3.He Leak Rate : 5 X 10-8  Pa m3/sec
4. SF6 Charge Pressure : 1300 ~ 1500 mbr
5. Vacuum Pump : Roots + Oil rotary
6. Control panel : Full Auto, 50 Model Setting
‌7. He Leak Detector : 10-12 Pa m3/sec