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Diffusion Pump System
4 inch ~ 22 inch
Diffusion Pump System
specification
1. Diffusion Pump : 6 inch (660 l/sec With Baffle)
2. Oil Rotary Pump : 400 l/min (2 Stage)
3. Vacuum Gauge : Full Range (760 ~ 10-9 Torr)
4. Control Panel : Full Auto(PLC control)
5. Ultimate Pressure : 5 X 10-6 Torr