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PFC, EVA, Cond.
SPECIFICATION
1. Chamber : 1150W X 890H X 350D 2Chamber
2. Vavuum Pumping Time : 20 sec to 0.05 Torr
3. Leak Rate : 5 X 10 - 9 mbar l/sec
4. He Recovery : 95 % 이상
5. N2 Pressure Test : 10 ~ 50 Bar
6. He Pressure : 10 ~ 30 bar
